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1845 S. Lewis St.
Anaheim, CA 92805
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Toll Free Phone: 800-747-2821
Local Phone: 714-938-1300
Member of
American Vacuum
Society
(AVS),
Society of
Vacuum Coaters
(SVC),
Association of Vacuum Equipment Manufacturers (AVEM)
Turbo Pumps

LEYBOLD turbomolecular pumps produce a clean high or ultrahigh vacuum. They can be easily operated and provide excellent reliability. Pressures down to 10-10 mbar (0.75 x 10-10 Torr) can be reached in combination with adequately dimensioned roughing pumps.

LEYBOLD is one of the world’s leading manufacturers of turbomolecular pumps. Consequently, the TURBOVAC pumps are successfully used in many applications.

Below are listed the most popular models of Leybold turbo pumps, along with the appropriate frequency converters and cables. Please inquire about additional sizes and configurations.

Principles of Operation

The turbomolecular pump is a bladed turbine that compresses gases. By the momentum transfer from the rapidly rotating rotor blades to the gas molecules the non-directed thermal motion of the molecules is changed to a directed motion. Hence, the pumping process in a turbomolecular pump results from the directed motion of the gas molecules from the inlet flange to the forevacuum port. In the molecular flow range- i.e. at pressures below 10-3 mbar (0.75 x 10-3 Torr) - the mean free path of the gas molecules is larger than the spacing between rotor and stator blades (typically some tenths of a millimeter). Consequently, the molecules collide primarily with the rotor blades with the result that the pumping process is highly efficient. In the laminar flow range- i.e. at pressures higher than 10-1 mbar (0.75 x 10-1 Torr) - the situation is completely different. The action of the rotor is diminished by the frequent collisions between the molecules. Therefore, a turbomolecular pump is not capable of pumping gases against atmospheric pressure and has to be backed by an adequate fore-vacuum pump. To create the directed motion of the gas molecules mentioned above the tips of the rotor blades have to move with supersonic velocity. Hence, a high rotational speed of the rotor is required. In case of LEYBOLD turbomolecular pumps the rotor speeds vary from about 36,000 rpm for large rotor diameters (e.g. TURBOVAC 1000, Å 20 cm (7.87 in.)) to 72,000 rpm for small rotor diameters (e.g. TURBOVAC 50, Å 6 cm (2.36 in.)

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Accessories:

More Leybold Pumps:

Leybold / Oerlikon Dry Pumps

Leybold / Oerlikon Single Stage Rotary Vane Pumps

Leybold / Oerlikon Turbo Pumps

 
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LEYBOLD TURBO PUMPS
PART # : 60.10017.01
PUMP MODEL: TURBOVAC 50 85400
FREQUENCY CONVERTERT: NT10
New
ULTIMATE VACUUM :<3.75 X 10-8
CONNECTING CABLE : 10.5 FEET 12108
PUMPING SPEED : 36 LITERS PER SECOND
WEIGHT: 2 KG
INLET : KF40
FORELINE FLANGE: KF16
COOLING METHOD: CONVECTION
PRICE NEW: $8,259
 
PART # : 60.10018.01
PUMP MODEL: TURBOVAC 151 85635
FREQUENCY CONVERTERT: NT20
New
ULTIMATE VACUUM : <0.75 X 10-10
CONNECTING CABLE : 10.5 FEET 85765
PUMPING SPEED : 135 LITERS PER SECOND
WEIGHT: 17 LBS
INLET : ISO100
FORELINE FLANGE: KF25
COOLING METHOD: WATERCOOLED
PRICE NEW: $8,259
 
PART # : 60.10019.01
PUMP MODEL: TURBOVAC 361 85670
FREQUENCY CONVERTERT: NT20
New
ULTIMATE VACUUM : <0.75 X 10-10
CONNECTING CABLE : 10.5 FEET 85765
PUMPING SPEED : 340 LITERS PER SECOND
WEIGHT: 26 LBS
INLET : ISO100
FORELINE FLANGE: KF25
COOLING METHOD: WATERCOOLED
PRICE NEW: $8,259
 
PART # : 60.10020.01
PUMP MODEL: TURBOVAC 600C 800150V0015
FREQUENCY CONVERTERT: NT20
New
ULTIMATE VACUUM : < 10-10
CONNECTING CABLE : 10.5 FEET 85765
PUMPING SPEED : 600 LITERS PER SECOND
WEIGHT: 37.5 LBS
INLET : ISO160
FORELINE FLANGE: KF40
COOLING METHOD: WATERCOOLED
PRICE NEW: $8,259
 
PART # : 60.10021.01
PUMP MODEL: TURBOVAC 1000C 89483
FREQUENCY CONVERTERT: NT20
New
ULTIMATE VACUUM : <0.75 X 10-10
CONNECTING CABLE : 10.5 FEET 85765
PUMPING SPEED : 880 LITERS PER SECOND
WEIGHT: 55.1 LBS
INLET : ISO200
FORELINE FLANGE: ISO63
COOLING METHOD: WATERCOOLED
PRICE NEW: $8,259
 
PART # : 60.10022.01
PUMP MODEL: TURBOVAC 1100C 800040V1144
FREQUENCY CONVERTERT: NT20
New
ULTIMATE VACUUM : <2.2 X 10-10
CONNECTING CABLE : 10.5 FEET 85765
PUMPING SPEED : 750 LITERS PER SECOND
WEIGHT: 48 LBS
INLET : ISO200
FORELINE FLANGE: KF40
COOLING METHOD: WATERCOOLED
PRICE NEW: $8,259
 
 
FREQUENCY CONVERTERS
PART # : 61.11047.01
PUMP MODEL: 90- 140 VOLT AC 85901
FREQUENCY CONVERTERT: NT10
New
ULTIMATE VACUUM :
CONNECTING CABLE :
PUMPING SPEED :
WEIGHT:
INLET :
FORELINE FLANGE:
COOLING METHOD:
PRICE NEW: $1,835
 
PART # : 61.14049.01
PUMP MODEL: 180 - 260 VOLT AC 85900
FREQUENCY CONVERTERT: NT10
New
ULTIMATE VACUUM :
CONNECTING CABLE :
PUMPING SPEED :
WEIGHT:
INLET :
FORELINE FLANGE:
COOLING METHOD:
PRICE NEW: $385
 
PART # : 61.11050.01
PUMP MODEL: 230 VOLT AC 85720
FREQUENCY CONVERTERT: NT20
New
ULTIMATE VACUUM :
CONNECTING CABLE :
PUMPING SPEED :
WEIGHT:
INLET :
FORELINE FLANGE:
COOLING METHOD:
PRICE NEW: $4,033
 
PART # : 61.11023.01
PUMP MODEL: 120 VOLT AC 82721
FREQUENCY CONVERTERT: NT20
New
ULTIMATE VACUUM :
CONNECTING CABLE :
PUMPING SPEED :
WEIGHT:
INLET :
FORELINE FLANGE:
COOLING METHOD:
PRICE NEW: $3,500
 
 
CABLE
PART # : 61.11048.01
PUMP MODEL: FEET CABLE 12108
FREQUENCY CONVERTERT: 10.5
New
ULTIMATE VACUUM :
CONNECTING CABLE :
PUMPING SPEED :
WEIGHT:
INLET :
FORELINE FLANGE:
COOLING METHOD:
PRICE NEW: $185
 
PART # : 61.11051.01
PUMP MODEL: FEET CABLE 85765
FREQUENCY CONVERTERT: 10.5
New
ULTIMATE VACUUM :
CONNECTING CABLE :
PUMPING SPEED :
WEIGHT:
INLET :
FORELINE FLANGE:
COOLING METHOD:
PRICE NEW: $185
 
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